Study of Multilayer Structures by Synchrotron Radiation with Small Angle Diffraction Method

Wang Jun; Cui Mingqi; Xu Wenxuan; Huang Yuying; Wang Dewu; Liu Jianfei; Xian Dingchang

Chinese Physics C> 1993, Vol. 17> Issue(S4) : 311-319

Study of Multilayer Structures by Synchrotron Radiation with Small Angle Diffraction Method

Institute of High Energy Physics, Chinese Academy of Sciences, Beijing, China

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Abstract：
Small angle diffraction on W/Si multilayer fabricated by magnetron sputtering is carried out at the diffraction station of Beijing Synchrotron Radiation Facility (BSRF). We present the analysis on the periodicity of the multilayer, the thickness of one period and the combination and give a comparison with the fitting result.

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Wang Jun, Cui Mingqi, Xu Wenxuan, Huang Yuying, Wang Dewu, Liu Jianfei and Xian Dingchang. Study of Multilayer Structures by Synchrotron Radiation with Small Angle Diffraction Method[J]. Chinese Physics C, 1993, 17(S4): 311-319.

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Received: 1992-10-30

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沈阳化工大学材料科学与工程学院沈阳 110142

Study of Multilayer Structures by Synchrotron Radiation with Small Angle Diffraction Method

Institute of High Energy Physics, Chinese Academy of Sciences, Beijing, China

Received Date: 1992-10-30

Abstract: Small angle diffraction on W/Si multilayer fabricated by magnetron sputtering is carried out at the diffraction station of Beijing Synchrotron Radiation Facility (BSRF). We present the analysis on the periodicity of the multilayer, the thickness of one period and the combination and give a comparison with the fitting result.