In-situ monitoring of EuTiO<SUB>3</SUB> and SrTiO<SUB>3</SUB> film growth using time-resolved X-ray scattering during pulsed-laser deposition

WANG Huan-Hua

doi:10.1088/1674-1137/33/11/002

Chinese Physics C> 2009, Vol. 33> Issue(11) : 935-943 DOI: 10.1088/1674-1137/33/11/002

In-situ monitoring of EuTiO₃ and SrTiO₃ film growth using time-resolved X-ray scattering during pulsed-laser deposition

WANG Huan-Hua ^,

(Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China)

Abstract
HTML
Reference
Related

PDF

Abstract：
Time-resolved X-ray scattering was employed to in-situ monitor the epitaxial growth process of the thin films and multilayers of EuTiO₃ and SrTiO₃ during pulsed laser deposition. The temporal intensity oscillations of the reflected X-rays at anti-Bragg position and the transient processes following the flux pulses were observed. The temporal intensity oscillations were used to control the film thickness, and the reflectivity along the crystal truncation rod was used to measure both the film thickness and the surface/interface roughness. The primary features of the X-ray intensity oscillations were reproduced via simulating the experimental data using diffusive rate equation model. Several mechanisms of determining the X-ray intensity features were discerned.

References

[1]

. WILLMOTT P R. Progress in Surface Science, 2004, 76:1632. WANG Huan-Hua, FLEET Aaron, BROCK Joel D et al.J. Appl. Phys., 2004, 96(9): 53243. Als-Nielsen J, McMorrow D. Elements of Modern X-ray Physics. New York: Wiley, 20014. HEADRICK R L, KYCIA S, WOLL A R et al. Phys. Rev.B, 1998, 58: 48185. HEADRICK R L, KYCIA S, PARK Y K et al. Phys. Rev.B, 1995, 54: 146866. FLEET A, DALE D, SUZUKI Y et al. Phys. Rev. Lett.,2005, 94: 0361027. NISHIMURA T, IKEDA A, NAMBA H et al. Surf. Sci.,1999, 421: 2738. ZEGENHAGEN J, HAAGE T, JIANG Q D. Appl. Phys.A: Matter. Sci. Proc., 1998, 67: 7119. LIPPMAA M, NAKAGAWA N, KAWASAKI M et al.Appl. Phys. Lett., 2000, 76: 243910. COHEN P I, Petrich G S, Pukite P R et al. Surf. Sci., 1989,216: 22211. ERES G, TISCHLER J Z, YOON M et al. Appl. Phys.Lett., 2002, 80: 3379

[1]	N. Amangeldi , N. Burtebayev , G. Yergaliuly , Maulen Nassurlla , B. Balabekov , Abylay Tangirbergen , Awad A. Ibraheem , Mohamed A. Dewidar , Sh. Hamada . Breakup of ⁷Li in the field of ^118,120Sn nuclei and its effect on the elastic scattering channel. Chinese Physics C, 2026, 50(2): 1-12.
[2]	. Soft pattern of gravitational Rutherford scattering from heavy target mass expansion. Chinese Physics C, 2026, 50(1): 013102. doi: 10.1088/1674-1137/ad62d6
[3]	Lu Feng , Tao Han , Jing-Fei Zhang , Xin Zhang . Prospects for searching for sterile neutrinos in dynamical dark energy cosmologies using joint observations of gravitational waves and γ-ray bursts. Chinese Physics C, 2026, 50(1): 1-12. doi: 10.1088/1674-1137/ae0b43
[4]	. ³H and ³He nuclei production in a combined thermal and coalescence framework for heavy-ion collisions in the few-GeV energy regime. Chinese Physics C, 2026, 50(1): 014104. doi: 10.1088/1674-1137/ae099a
[5]	Víctor Miguel Banda Guzmán , Rubén Flores-Mendieta , Johann Hernández . Use of SU(3) flavor projection operators to construct baryon-meson scattering amplitudes in the 1/N_c expansion. Chinese Physics C, 2026, 50(2): 1-25.
[6]	K. S. Kim , P. T. P. Hutauruk , Seung-il Nam , Chang Ho Hyun . Effect of neutrino electromagnetic properties on quasielastic neutral-current neutrino-nucleus scattering. Chinese Physics C, 2025, 49(11): 113106. doi: 10.1088/1674-1137/adf1f2
[7]	Jian Liu , Qiang Su , Qinglin Niu , Lei Wang , Zhongzhou Ren . Charged-current quasielastic neutrino scattering off nuclei with nucleon-nucleon short-range correlations. Chinese Physics C, 2025, 49(10): 104102. doi: 10.1088/1674-1137/ade126
[8]	Tetsuaki Moriguchi , Momo Mukai , Naoto Kaname , Akira Ozawa , Shinji Suzuki , Yasushi Abe , Hiroki Arakawa , Tomoya Fujii , Daiki Hamakawa , Sakumi Harayama , Shun Hosoi , Yasuto Inada , Kumi Inomata , Reo Kagesawa , Daisuke Kajiki , Daiki Kamioka , Masanori Kanda , Atsushi Kitagawa , Takaaki Kobayashi , Daisuke Nagae , Sarah Naimi , Kunimitsu Nishimuro , Shunichiro Omika , Misaki Otsu , Mamoru Sakaue , Shinji Sato , Hibiki Seki , Naru Shinozaki , Takeshi Suzuki , Keisuke Tomita , Takayuki Yamaguchi , Yoshitaka Yamaguchi , Asahi Yano , Kenjiro Yokota . Improvements of time-of-flight detector utilizing a thin foil and crossed static electric and magnetic fields. Chinese Physics C, 2025, 49(10): 104001. doi: 10.1088/1674-1137/ade95b
[9]	Yangfan Guo , Zhou Yan , Xiaofei Yang , Shaojie Chen , Wencong Mei , Hanrui Hu , Yinshen Liu , Dongyang Chen , Chen Zhang , Tianxu Gao , Yipin Jing , Yanlin Ye . Development of cesium laser resonance ionization schemes for PLASEN experiment. Chinese Physics C, 2025, 49(12): 124002. doi: 10.1088/1674-1137/adf49e
[10]	Manpreet Kaur , Sushil Kumar , Sukhjeet Singh , A. K. Jain . Signature splitting in three-quasineutron rotational band 3/2[521]_ν$\otimes $1/2[660]_ν$\otimes $1/2[660]_νof ¹⁵⁵Dy. Chinese Physics C, 2025, 49(10): 104103. doi: 10.1088/1674-1137/ade95e
[11]	Bo Lan , Qin-Ze Song , Jin-Huan Sheng , Yi Qiao , Ru-Min Wang . Study of χ_cJ (J = 0,1,2) decays to light meson pairs based on SU(3) flavor symmetry/breaking analysis. Chinese Physics C, 2025, 49(12): 123106. doi: 10.1088/1674-1137/adff00
[12]	Ulaş Özdem . Unveiling the electromagnetic structure and intrinsic dynamics of spin-3/2 hidden-charm pentaquarks: A comprehensive QCD analysis. Chinese Physics C, 2025, 49(10): 103106. doi: 10.1088/1674-1137/ade95a
[13]	. SU(3) flavor symmetry analysis of hyperon non-leptonic two body decays. Chinese Physics C, 2025, 49(12): 123101. doi: 10.1088/1674-1137/adf1f1
[14]	Yu-xin Cheng , De-hao Zhao , Yue-yang Shao , Li Gong , Tao Wang , Xiao-shen Kang . SU(3) analysis for B(E2) anomaly. Chinese Physics C, 2025, 49(10): 104105. doi: 10.1088/1674-1137/aded05
[15]	. Double-folding analysis of elastic and inelastic ³He-nucleus scattering at 60 MeV. Chinese Physics C, 2025, 49(11): 114101. doi: 10.1088/1674-1137/ade1cb
[16]	ZHANG Cong , HE Yuan , ZHAO Hong-Wei , ZHANG Sheng-Hu . Multipacting simulation and analysis of a taper quarter wave cavity by using Analyst-PT3P. Chinese Physics C, 2012, 36(4): 362-366. doi: 10.1088/1674-1137/36/4/012
[17]	ZHOU Yong-Zhao , LIANG Hao , XUE Jun-Dong , CHEN Yi-Xin , YANG Tao , GONG Da-Tao , JIN Ge , YU Xiao-Qi . An Online Program for Monitoring KLOE Experiment. Chinese Physics C, 2002, 26(6): 620-625.
[18]	Li Yangguo . Antiproton -Nucleus Charge Exchange Reaction and Inelastic Scattering. Chinese Physics C, 1996, 20(11): 1021-1027.
[19]	HOU Ren-Chang , ZHAO Xuan . QUADRUPOLE-OCTUPOLE TWO-PHONON EXCITATIONS IN INELASTIC SCATTERING. Chinese Physics C, 1983, 7(2): 236-244.

Access

Get Citation

WANG Huan-Hua. In-situ monitoring of EuTiO₃ and SrTiO₃ film growth using time-resolved X-ray scattering during pulsed-laser deposition[J]. Chinese Physics C, 2009, 33(11): 935-943. doi: 10.1088/1674-1137/33/11/002

RIS(for EndNote,Reference Manager,ProCite)

BibTex

Txt

Milestone

Received: 2008-12-17
Revised: 2009-03-31

Article Metric

Article Views(4218)
PDF Downloads(622)
Cited by(0)

Policy on re-use

To reuse of subscription content published by CPC, the users need to request permission from CPC, unless the content was published under an Open Access license which automatically permits that type of reuse.

通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

In-situ monitoring of EuTiO₃ and SrTiO₃ film growth using time-resolved X-ray scattering during pulsed-laser deposition

Corresponding author: WANG Huan-Hua,

(Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China)

Received Date: 2008-12-17

Accepted Date: 2009-03-31

Available Online: 2009-11-05

Abstract:

Time-resolved X-ray scattering was employed to in-situ monitor the epitaxial growth process of the thin films and multilayers of EuTiO₃ and SrTiO₃ during pulsed laser deposition. The temporal intensity oscillations of the reflected X-rays at anti-Bragg position and the transient processes following the flux pulses were observed. The temporal intensity oscillations were used to control the film thickness, and the reflectivity along the crystal truncation rod was used to measure both the film thickness and the surface/interface roughness. The primary features of the X-ray intensity oscillations were reproduced via simulating the experimental data using diffusive rate equation model. Several mechanisms of determining the X-ray intensity features were discerned.

HTML

Reference (1)

In-situ monitoring of EuTiO₃ and SrTiO₃ film growth using time-resolved X-ray scattering during pulsed-laser deposition

Abstract：

References

Access

Article Metrics

Metrics

通讯作者: 陈斌, bchen63@163.com

Email This Article

In-situ monitoring of EuTiO₃ and SrTiO₃ film growth using time-resolved X-ray scattering during pulsed-laser deposition

Corresponding author: WANG Huan-Hua,

HTML

目录

In-situ monitoring of EuTiO3 and SrTiO3 film growth using time-resolved X-ray scattering during pulsed-laser deposition

Abstract：

References

Access

Article Metrics

Metrics

通讯作者: 陈斌, bchen63@163.com

Email This Article

In-situ monitoring of EuTiO3 and SrTiO3 film growth using time-resolved X-ray scattering during pulsed-laser deposition

Corresponding author: WANG Huan-Hua,

HTML

目录

In-situ monitoring of EuTiO₃ and SrTiO₃ film growth using time-resolved X-ray scattering during pulsed-laser deposition

In-situ monitoring of EuTiO₃ and SrTiO₃ film growth using time-resolved X-ray scattering during pulsed-laser deposition