High resolution X-ray diffraction investigation of epitaxially grown SrTiO<SUB>3</SUB> thin films by laser-MBE

ZHAI Zhang-Yin; WU Xiao-Shan; JIA Quan-Jie

doi:10.1088/1674-1137/33/11/004

Chinese Physics C> 2009, Vol. 33> Issue(11) : 949-953 DOI: 10.1088/1674-1137/33/11/004

High resolution X-ray diffraction investigation of epitaxially grown SrTiO₃ thin films by laser-MBE

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Abstract：
SrTiO₃ thin films are epitaxially grown on DyScO₃, LaAlO₃ substrates with/without buffer layers of DyScO₃ and SrRuO₃ using laser-MBE. X-ray diffraction methods, such as high resolution X-ray diffraction, grazing incident X-ray diffraction, and reciprocal space mapping are used to investigate the lattice structure, dislocation density, in-plane lattice strain distribution along film thickness. From the measurement results, the effects of substrate on film lattice quality and microstructure are discussed.

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ZHAI Zhang-Yin, WU Xiao-Shan and JIA Quan-Jie. High resolution X-ray diffraction investigation of epitaxially grown SrTiO₃ thin films by laser-MBE[J]. Chinese Physics C, 2009, 33(11): 949-953. doi: 10.1088/1674-1137/33/11/004

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Received: 2008-12-17
Revised: 2009-04-02

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通讯作者: 陈斌, bchen63@163.com

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沈阳化工大学材料科学与工程学院沈阳 110142

High resolution X-ray diffraction investigation of epitaxially grown SrTiO₃ thin films by laser-MBE

Corresponding author: WU Xiao-Shan,

Received Date: 2008-12-17

Accepted Date: 2009-04-02

Available Online: 2009-11-05

Abstract:

SrTiO₃ thin films are epitaxially grown on DyScO₃, LaAlO₃ substrates with/without buffer layers of DyScO₃ and SrRuO₃ using laser-MBE. X-ray diffraction methods, such as high resolution X-ray diffraction, grazing incident X-ray diffraction, and reciprocal space mapping are used to investigate the lattice structure, dislocation density, in-plane lattice strain distribution along film thickness. From the measurement results, the effects of substrate on film lattice quality and microstructure are discussed.

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High resolution X-ray diffraction investigation of epitaxially grown SrTiO₃ thin films by laser-MBE

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High resolution X-ray diffraction investigation of epitaxially grown SrTiO₃ thin films by laser-MBE

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High resolution X-ray diffraction investigation of epitaxially grown SrTiO3 thin films by laser-MBE

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High resolution X-ray diffraction investigation of epitaxially grown SrTiO3 thin films by laser-MBE

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High resolution X-ray diffraction investigation of epitaxially grown SrTiO₃ thin films by laser-MBE

High resolution X-ray diffraction investigation of epitaxially grown SrTiO₃ thin films by laser-MBE