Preparation of a silicon micro-strip nuclear radiation detector by a two-step annealing process

LI Hai-Xia; LI Zhan-Kui; WANG Fang-Cong; WANG Zhu-Sheng; WANG Xiu-Hua; LI Chun-Yan

doi:10.1088/1674-1137/35/7/007

Chinese Physics C> 2011, Vol. 35> Issue(7) : 635-637 DOI: 10.1088/1674-1137/35/7/007

Preparation of a silicon micro-strip nuclear radiation detector by a two-step annealing process

Abstract
HTML
Reference
Related

PDF

Abstract：
The annealing process for boron implantation is a crucial step during large size nuclear radiation detector fabrication. It can reduce the lattice defects and the projection straggling. A two-step annealing process for boron implantation was developed instead of a one-step annealing process, and the reverse body resistance of a silicon micro-strip detector was significantly increased, which means that the performance of the detector was improved.

References

[1]

O' Sullivan B J, Hurley P K, Leveugle C et al. J. Appl. Phys., 2001, 89(7): 38112 Santucci S, Guerrieri S, Passacantando M et al. J. Non-Crys. Solids, 2001, 280: 543 Briantseve T A, Lebedeva Z M, Lioubtchenko D V et al. Appl. Surf. Sci., 2000, 156: 214 Nobili D, Armigliato A, Finetti M, Solmi S. J. Appl. Phys., 1982, 53(3): 14845 Tamura M M. Mater. Sci. Rep., 1991, 6: 1416 Schreutelkamp R J, Custer J S, Liefting J R, LU W X, Saris F W. Mater. Sci. Rep., 1991, 6: 2757 Kim Y, Massoud H Z, Fair R. J. Electron. Mater., 1989, 18: 1438 Sands T, Washburn J, Myers E, Sadana D K. Nucl. In-strum. Methods B, 1985, 7: 3379 Seidel T E, Lischner D J, Pai C S, Knoell R V, Maher D M, Jacobson D C. Nucl. Instrum. Methods B, 1985, 7: 25110 Ajmera A C, Rozgonyi G A, Fair R B. Appl. Phys. Lett. J., 1988, 2: 813

[1]	B A Urazbekov , E K Almanbetova , A Azhibekov , B S Baimurzinova , K Dyussebayeva , T Issatayev , D M Janseitov , S M Lukyanov , Yu E Penionzhkevich , K Mendibayev , T K Zholdybayev . Probing the cluster structure of ⁶Li with the nuclear reaction ⁶Li + ¹²C at 68 MeV. Chinese Physics C, 2026, 50(2): 1-11.
[2]	Cheng Hu , Xiao-Xiong Zeng . Hawking tunneling radiation with thermodynamic pressure. Chinese Physics C, 2026, 50(2): 1-8.
[3]	Shuang Qu , Jin-Yan Zhang , Man Bao . Nuclear mass predictions with a Bayesian neural network. Chinese Physics C, 2025, 49(10): 104106. doi: 10.1088/1674-1137/ade958
[4]	Tetsuaki Moriguchi , Momo Mukai , Naoto Kaname , Akira Ozawa , Shinji Suzuki , Yasushi Abe , Hiroki Arakawa , Tomoya Fujii , Daiki Hamakawa , Sakumi Harayama , Shun Hosoi , Yasuto Inada , Kumi Inomata , Reo Kagesawa , Daisuke Kajiki , Daiki Kamioka , Masanori Kanda , Atsushi Kitagawa , Takaaki Kobayashi , Daisuke Nagae , Sarah Naimi , Kunimitsu Nishimuro , Shunichiro Omika , Misaki Otsu , Mamoru Sakaue , Shinji Sato , Hibiki Seki , Naru Shinozaki , Takeshi Suzuki , Keisuke Tomita , Takayuki Yamaguchi , Yoshitaka Yamaguchi , Asahi Yano , Kenjiro Yokota . Improvements of time-of-flight detector utilizing a thin foil and crossed static electric and magnetic fields. Chinese Physics C, 2025, 49(10): 104001. doi: 10.1088/1674-1137/ade95b
[5]	Yi Wei Hao , Yi Fei Niu , Zhong Ming Niu . The Role of Fission in Mass Sensitivity Study of the r-process. Chinese Physics C, 2025, 49(): 1-7. doi: 10.1088/1674-1137/adfe55
[6]	Zhen-Ming Xu , Bin Wu , Tao Yang , Wen-Li Yang . A new measure of thermal micro-behavior for the AdS black hole. Chinese Physics C, 2021, 45(1): 015106. doi: 10.1088/1674-1137/abc23e
[7]	Peng Yin , Jianmin Dong , Wei Zuo . Effect of tensor correlations on the depletion of nuclear Fermi sea within the extended BHF approach. Chinese Physics C, 2017, 41(11): 114102. doi: 10.1088/1674-1137/41/11/114102
[8]	DU Ying-Shuai , YUE Qian , LIU Yi-Bao , CHEN Qing-Hao , LI Jin , CHENG Jian-Ping , KANG Ke-Jun , LI Yuan-Jing , LI Yu-Lan , MA Hao , XING Hao-Yang , YU Xun-Zhen , ZENG Zhi . Characterization of large area photomultiplier ETL 9357FLB for liquid argon detector. Chinese Physics C, 2014, 38(7): 076003. doi: 10.1088/1674-1137/38/7/076003
[9]	M. Bashkanov (for the WASA-at-COSY collaboration) . ABC effect in double-pionic nuclear fusion and a pn resonance as its possible origin. Chinese Physics C, 2010, 34(9): 1339-1341. doi: 10.1088/1674-1137/34/9/037
[10]	YE Yan-Lin , ZHOU Xiao-Hong , LIU Wei-Ping , MA Yu-Gang , ZHANG Yu-Hu , XU Fu-Rong . Outline of the progress in the study of radioactive nuclear physics and super-heavy nuclei. Chinese Physics C, 2008, 32(S2): 1-7.
[11]	LIU Chang-Long , LU Yi-Ying , YIN LI . Effects of Additional Vacancy-Like Defects Produced by Ion Impealations on Boron Thermal Diffusion in Silicon. Chinese Physics C, 2005, 29(11): 1107-1111.
[12]	Guo Hua . In-medium QMC Model Parameters and Quark Condensation in Nuclear Matter. Chinese Physics C, 1999, 23(5): 459-468.
[13]	Yu Hong , Shen Qixing , Zhang Lin . Angular Distribution of Process e⁺e^－→τ⁺τ^－,τ^－→a₁υτ,a₁→ρπ and Characteristics of a₁ Meson. Chinese Physics C, 1994, 18(7): 583-590.
[14]	Sa Ben-hao , Zhang Xi-zhen , Li Zhu-xia , Shi Yi-jin . A PRIMARY RESEARCH OF THE PHONON RENORMALIZATION OF NUCLEAR FIELD THEORY. Chinese Physics C, 1980, 4(3): 398-400.
[15]	WU SHI-SHU . ON NUCLEAR SINGLE-PARTICLE POTENTIALS（Ⅲ）SINGLEPARTICLE ENERGIES DETERMINED BY THE NONHERMITIAN POTENTIAL U_αβ=M_αβ（ε_β）. Chinese Physics C, 1979, 3(4): 469-483.

Access

Get Citation

LI Hai-Xia, LI Zhan-Kui, WANG Fang-Cong, WANG Zhu-Sheng, WANG Xiu-Hua and LI Chun-Yan. Preparation of a silicon micro-strip nuclear radiation detector by a two-step annealing process[J]. Chinese Physics C, 2011, 35(7): 635-637. doi: 10.1088/1674-1137/35/7/007

RIS(for EndNote,Reference Manager,ProCite)

BibTex

Txt

Milestone

Received: 2010-09-10
Revised: 2010-10-26

Article Metric

Article Views(3985)
PDF Downloads(496)
Cited by(0)

Policy on re-use

To reuse of subscription content published by CPC, the users need to request permission from CPC, unless the content was published under an Open Access license which automatically permits that type of reuse.

通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

Preparation of a silicon micro-strip nuclear radiation detector by a two-step annealing process

Received Date: 2010-09-10
Accepted Date: 2010-10-26
Available Online: 2011-07-05

Abstract: The annealing process for boron implantation is a crucial step during large size nuclear radiation detector fabrication. It can reduce the lattice defects and the projection straggling. A two-step annealing process for boron implantation was developed instead of a one-step annealing process, and the reverse body resistance of a silicon micro-strip detector was significantly increased, which means that the performance of the detector was improved.