Discharge characteristics of the DUHOCAMIS with a high magnetic bottle-shaped field

FU Dong-Po; ZHAO Wei-Jiang; GUO Peng; ZHU Kun; WANG Jing-Hui; HUA Jing-Shan; REN Xiao-Tang; XUE Jian-Ming; ZHAO Hong-Wei; LIU Ke-Xin

doi:10.1088/1674-1137/38/10/107006

Chinese Physics C> 2014, Vol. 38> Issue(10) : 107006 DOI: 10.1088/1674-1137/38/10/107006

Discharge characteristics of the DUHOCAMIS with a high magnetic bottle-shaped field

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Abstract：
For the purpose of producing high intensity, multiply charged metal ion beams, the dual hollow cathode ion source for metal ions (DUHOCAMIS) was derived from the hot cathode Penning ion source combined with the hollow cathode sputtering experiments in 2007. To investigate the behavior of this discharge geometry in a stronger magnetic bottle-shaped field, a new test bench for DUHOCAMIS with a high magnetic bottle-shaped field up to 0.6 T has been set up at the Peking University. The experiments with magnetic fields from 0.13 T to 0.52 T have indicated that the discharge behavior is very sensitive to the magnetic flux densities. The slope of discharge curves in a very wide range can be controlled by changing the magnetic field as well as regulated by adjusting the cathode heating power; the production of metallic ions would be much greater than gas ions with the increased magnetic flux density; and the magnetic field has a much higher influence on the DHCD mode than on the PIG mode.

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FU Dong-Po, ZHAO Wei-Jiang, GUO Peng, ZHU Kun, WANG Jing-Hui, HUA Jing-Shan, REN Xiao-Tang, XUE Jian-Ming, ZHAO Hong-Wei and LIU Ke-Xin. Discharge characteristics of the DUHOCAMIS with a high magnetic bottle-shaped field[J]. Chinese Physics C, 2014, 38(10): 107006. doi: 10.1088/1674-1137/38/10/107006

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Received: 2014-01-02
Revised: 1900-01-01

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沈阳化工大学材料科学与工程学院沈阳 110142

Discharge characteristics of the DUHOCAMIS with a high magnetic bottle-shaped field

Corresponding author: ZHAO Wei-Jiang,

Received Date: 2014-01-02
Accepted Date: 1900-01-01
Available Online: 2014-10-05

Abstract: For the purpose of producing high intensity, multiply charged metal ion beams, the dual hollow cathode ion source for metal ions (DUHOCAMIS) was derived from the hot cathode Penning ion source combined with the hollow cathode sputtering experiments in 2007. To investigate the behavior of this discharge geometry in a stronger magnetic bottle-shaped field, a new test bench for DUHOCAMIS with a high magnetic bottle-shaped field up to 0.6 T has been set up at the Peking University. The experiments with magnetic fields from 0.13 T to 0.52 T have indicated that the discharge behavior is very sensitive to the magnetic flux densities. The slope of discharge curves in a very wide range can be controlled by changing the magnetic field as well as regulated by adjusting the cathode heating power; the production of metallic ions would be much greater than gas ions with the increased magnetic flux density; and the magnetic field has a much higher influence on the DHCD mode than on the PIG mode.