Study on Structure of Multilayers by Synchrotron Radiation Small Angle Diffraction Method

Wang Jun; Cui Mingqi; Xu Wenxuan; Huang Yuying; Wang Dewu; Liu Jianfei; Xian Dingchang

Chinese Physics C> 1994, Vol. 18> Issue(1) : 13-19

Study on Structure of Multilayers by Synchrotron Radiation Small Angle Diffraction Method

Institute of High Energy Physics,Beijing 100039

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Abstract：
W/Si and Nb/Si multilayers were fabricated by magnetron sputtering technique and measured by small angle diffraction at the diffraction station of Beijing Synchrotron Radiation Facility (BSRF). The periodicity and composition of the multilayer were analysed. The simulation and experiment results were compared.

References

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F.Schaeferset al,Proc.SPIE,984（1988）23.[2]A.Khandaret al,Proc.SPIE,688（1986）176.[3]崔明启等，全国薄膜学术讨论会（TFC'91）论文集，（1991）248.[4]R.W.JAMes,”The Optical Principles of the Diffraction of X-RAy“（Cornell University,Ithaca.New York,1965）P168.[5]R.W.James,Solid State Physics.15（1963）63.[6]T.W.Barbee,Jr.,AIP Conf.Proc,75（1981）131.[7]J.WAng,M.Q.Cui,Y.Y.Huang,D.XiAn Proceedings of Symposium on Engineering Optics SJSEO'92Beijing.

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Wang Jun, Cui Mingqi, Xu Wenxuan, Huang Yuying, Wang Dewu, Liu Jianfei and Xian Dingchang. Study on Structure of Multilayers by Synchrotron Radiation Small Angle Diffraction Method[J]. Chinese Physics C, 1994, 18(1): 13-19.

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Received: 1900-01-01
Revised: 1900-01-01

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