Analysing Depth Profile of Hydrogen in Materals by Elastic Recoil Detection

Liu Shijie; Wu Yue; Sheng Kanglong; Li Chunying

Chinese Physics C> 1989, Vol. 13> Issue(S2) : 131-138

Analysing Depth Profile of Hydrogen in Materals by Elastic Recoil Detection

1. Institute of High Energy Physics, Chinese Acadmy of Sciences, Beijing;
2. Institute of Nuclear Research, Chinese Acadmy of Sciences, Shanghai;
3. North China Electro-Optics Research Institute, Beijing

Abstract
HTML
Reference
Related

PDF

Abstract：
The elastic recoil detection (ERD) by using a 2.0-2.5 MeV 4He ion beam has been performed to detect the depth profile of hydrogen in the silicon oxide and silicon nitride films. The correlation between the hydrogen content and deposition condition is given. Maximum probing depth, detection limit and depth resolution are discussed under our experiment conditions.

[1]	Jiayin Gu , Ying-Ying Li . Optimizing Higgs factories by modifying the recoil mass. Chinese Physics C, 2018, 42(3): 033102. doi: 10.1088/1674-1137/42/3/033102
[2]	Guan-Ying Wang , Ran Han , Xiao-Ping Ouyang , Jin-Cheng He , Jun-Yao Yan . Potential reduction interior point algorithm unfolding of neutron energy spectrum measured by recoil proton method. Chinese Physics C, 2017, 41(5): 056201. doi: 10.1088/1674-1137/41/5/056201
[3]	Sheng-Dong Gu , Wei-Bin Liu . Uniform transverse beam profile with a new type of nonlinear magnet. Chinese Physics C, 2017, 41(6): 067003. doi: 10.1088/1674-1137/41/6/067003
[4]	Xing-Cai Guan , Yong-Kai Lu , Hou-Jun He , Jiang-Tao Zhao , Qiang Wang , Kai-Hong Fang , Xuan Meng , Tie-Shan Wang , Jirohta Kasagi . Deuterium depth distribution study in Yb. Chinese Physics C, 2017, 41(5): 054002. doi: 10.1088/1674-1137/41/5/054002
[5]	Ming-Yang Huang , Xin-Heng Guo , Bing-Lin Young . Detection of supernova neutrinos at spallation neutron sources. Chinese Physics C, 2016, 40(7): 073102. doi: 10.1088/1674-1137/40/7/073102
[6]	Dong-Dong Pan , Tai-Ran Liang , Wen Yin , Ze-En Yao . Calculation of hydrogen and helium concentrations for CSNS target. Chinese Physics C, 2016, 40(3): 037004. doi: 10.1088/1674-1137/40/3/037004
[7]	XIE Hong-Ming , WU Jun-Xia , ZHANG Yong , ZHU Guang-Yu , XIA Jia-Wen , YE Min-You . Beam experiments with a non-intercepting beam induced fluorescence profile monitor for the ADS LINAC. Chinese Physics C, 2015, 39(11): 117004. doi: 10.1088/1674-1137/39/11/117004
[8]	QIN Zhen-Xing , TANG Ling-Yun , LIU Jing , CHEN Xiao-Jia . Phase transitions in a hydrogen-rich compound：tetramethylsilane. Chinese Physics C, 2013, 37(9): 098001. doi: 10.1088/1674-1137/37/9/098001
[9]	YANG Zhen , LONG Ji-Dong , DONG Pan , WANG Tao , WEI Tao , HE Xiao-Zhong , ZHANG Kai-Zhi , SHI Jin-Shui . A preliminary study of a negative hydrogen PIG-type ion source for the compact cyclotron. Chinese Physics C, 2012, 36(10): 1000-1003. doi: 10.1088/1674-1137/36/10/015
[10]	QI Jian-Min , ZHOU Lin , JIANG Shi-Lun . Design and performance analysis of a compact magnetic proton recoil spectrometer for DT neutrons. Chinese Physics C, 2011, 35(4): 374-380. doi: 10.1088/1674-1137/35/4/010
[11]	LIAO Yan-Fei , ZHANG Zhi-Ming , LI Dao-Wu , SHUAI Lei , SHAN Bao-Ci , HUANG Xian-Chao , LIU Jun-Hui , CHEN Yan , WANG Ying-Jie , LIU Shuang-Quan , WANG Pei-Lin , WEI Shu-Jun , WEI Long . Preliminary study of depth of interaction measurement for a PET detector. Chinese Physics C, 2011, 35(11): 1070-1073. doi: 10.1088/1674-1137/35/11/017
[12]	LIU Sheng-Guang , Masafumi Fukuda , Sakae Araki , Nobuhiro Terunuma , Junji Urakawa . Emittance measurement & optimization for the photocathode RF gun with laser profile shaping. Chinese Physics C, 2010, 34(5): 584-588. doi: 10.1088/1674-1137/34/5/014
[13]	CHENG Dao-Wen , GU De-Shan , LIU Lin-Mao , JIA Fu-Quan , LI Xiang-Long . Improvement of the determination of hydrogen content in a multicomponent sample by D—T generator. Chinese Physics C, 2010, 34(5): 606-609. doi: 10.1088/1674-1137/34/5/019
[14]	GUO Xin-Heng , HUANG Ming-Yang , Young Bing-Lin . Supernova neutrino detection on earth. Chinese Physics C, 2010, 34(2): 257-261. doi: 10.1088/1674-1137/34/2/020
[15]	WANG Yi , CHENG Jian-Ping , LI Yuan-Jing , LUO Ming , ZHANG Guo-Guang . An MRPC for fast neutron detection. Chinese Physics C, 2010, 34(1): 88-91. doi: 10.1088/1674-1137/34/1/016
[16]	for the , Crystal Ball , at MAMI , and A . Recoil polarimetry with the Crystal Ball at MAMI. Chinese Physics C, 2009, 33(12): 1183-1188. doi: 10.1088/1674-1137/33/12/021
[17]	M.H. Sikora , D.I. Glazier , D.P. Watts . Recoil polarimetry in meson photoproduction at MAMI. Chinese Physics C, 2009, 33(12): 1377-1380. doi: 10.1088/1674-1137/33/12/059
[18]	ZHOU Qing-Ming , ZHANG Hong , LI Qiang , WEI Li-Li , LIU Xin-Guo , GU Meng-Xia , WU Gui-Hong , DAI Zhong-Yin . Rotating wheel filter design and optimization for a uniform depth dose distribution in heavy ion therapy. Chinese Physics C, 2008, 32(S2): 294-298.
[19]	Li Fubin . Construction of Creation-Annihilation Operators for Hydrogen Atom and Related Potentials with the Concepts of Supersymmetric Quantum Mechanics. Chinese Physics C, 1992, 16(S2): 173-177.
[20]	LIU Shi-Jie , WU Yue , SHENG Kang-Long , LI Chun-Ying . ANALYSIS DEPTH PROFILING IN MATERALS BY ELASTIC RECOIL DETECTION. Chinese Physics C, 1989, 13(6): 481-486.

Access

Get Citation

Liu Shijie, Wu Yue, Sheng Kanglong and Li Chunying. Analysing Depth Profile of Hydrogen in Materals by Elastic Recoil Detection[J]. Chinese Physics C, 1989, 13(S2): 131-138.

Liu Shijie, Wu Yue, Sheng Kanglong and Li Chunying. Analysing Depth Profile of Hydrogen in Materals by Elastic Recoil Detection[J]. Chinese Physics C, 1989, 13(S2): 131-138. shu

RIS(for EndNote,Reference Manager,ProCite)

BibTex

Txt

Milestone

Received: 1988-05-23

Fund

Supported by Science Fund of Chinese Academy of Sciences

Article Metric

Article Views(644)
PDF Downloads(3)
Cited by(0)

Policy on re-use

To reuse of subscription content published by CPC, the users need to request permission from CPC, unless the content was published under an Open Access license which automatically permits that type of reuse.

通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

Analysing Depth Profile of Hydrogen in Materals by Elastic Recoil Detection

1. Institute of High Energy Physics, Chinese Acadmy of Sciences, Beijing;
2. Institute of Nuclear Research, Chinese Acadmy of Sciences, Shanghai;
3. North China Electro-Optics Research Institute, Beijing

Received Date: 1988-05-23

Fund Project: Supported by Science Fund of Chinese Academy of Sciences

Abstract: The elastic recoil detection (ERD) by using a 2.0-2.5 MeV 4He ion beam has been performed to detect the depth profile of hydrogen in the silicon oxide and silicon nitride films. The correlation between the hydrogen content and deposition condition is given. Maximum probing depth, detection limit and depth resolution are discussed under our experiment conditions.