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Abstract：
The identical graphite targets were irradiated by 60keV Ni+and Ar+ ions with the fluences of 1018/cm2 in turns under the same experimental conditions. Using high-resolution transmission electron microscope (HRTEM) with energy dispersive X-ray (EDX) and electron diffraction (ED), we found different-size nanoscale Ar-bubbles embedded in glass-carbon-like membranes for the first time. Moreover, in part of these nanobubbles Ar may have been formed into a solid-like structures.
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